International Standards and Conformity Assessment for all electrical, electronic and related technologies

CLC/BTWG 83-1

On-line monitoring of metallic contamination in silicon wafers (Disbanded)

 
 
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CLC/BTWG 83-1 Scope

CLC/BTWG 83-1

To prepare a draft standard, as described in BT(IE/NOT)2 for measurement of metallic contamination in silicon wafers based upon novel photo-generated minority carrier electrical techniques.

Further information

Secretariat
Ireland

 Illustration: Tools

Tools (members only)

Collaboration Tool
pdf