CENELEC
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
CLC/BTWG 83-1 |
On-line monitoring of metallic contamination in silicon wafers (Disbanded) |
CLC/BTWG 83-1 Scope
CLC/BTWG 83-1
To prepare a draft standard, as described in BT(IE/NOT)2 for measurement of metallic contamination in silicon wafers based upon novel photo-generated minority carrier electrical techniques.
