CENELEC - Standards Development - List of Technical Bodies - CLC/SR 47F

CLC/SR 47F

Micro-electromechanical systems

 
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CLC/SR 47F Work programme

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FprEN 62047-15:2014 (pr=25237)
Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding strength between PDMS and glass
5020  2013-12-182014-02-072014-05-09 
FprEN 62047-16:2014 (pr=25238)
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films; wafer curvature and cantilever beam deflection methods
5020  2013-12-182014-02-072014-05-09 
FprEN 62047-17:2013 (pr=25011)
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
5060  2013-08-192014-02-032014-02-24 
FprEN 62047-20:2014 (pr=24671)
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
5020  2013-01-152014-04-042014-06-06 
FprEN 62047-21:2014 (pr=24672)
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
5020  2013-01-152014-03-142014-05-16 
FprEN 62047-22:2014 (pr=24695)
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
5020  2013-01-232014-03-142014-05-16 

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CLC/SR 47F Publications

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EN 62047-10:2011 (pr=23075)
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
2011-09-09 export to doc file  EN  FR  DE
EN 62047-11:2013 (pr=23953)
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
2013-09-27 export to doc file  EN  FR  DE
EN 62047-12:2011 (pr=23076)
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
2011-10-21 export to doc file  EN  FR  DE
EN 62047-13:2012 (pr=23280)
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
2012-04-06 export to doc file  EN  FR  DE
EN 62047-14:2012 (pr=23220)
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
2012-04-06 export to doc file  EN  FR  DE
EN 62047-18:2013 (pr=24073)
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
2013-09-27 export to doc file  EN  FR  DE
EN 62047-19:2013 (pr=24006)
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
2013-09-27 export to doc file  EN  FR  DE
EN 62047-5:2011 (pr=22629)
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
2011-08-19 export to doc file  EN  FR  DE
EN 62047-6:2010 (pr=21554)
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
2010-03-05 export to doc file  EN  FR  DE
EN 62047-7:2011 (pr=22658)
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection
2011-08-05 export to doc file  EN  FR  DE
EN 62047-8:2011 (pr=22628)
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
2011-05-06 export to doc file  EN  FR  DE
EN 62047-9:2011 (pr=22644)
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
2011-08-19 export to doc file  EN  FR  DE

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CLC/SR 47F Maintenance cycle

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EN 62047-10:2011 (pr=23075)
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
2011-09-09 2019-09-09CLC/SR 47F 
EN 62047-11:2013 (pr=23953)
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
2013-09-27 2021-09-27CLC/SR 47F 
EN 62047-12:2011 (pr=23076)
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
2011-10-21 2019-10-21CLC/SR 47F 
EN 62047-13:2012 (pr=23280)
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
2012-04-06 2020-04-06CLC/SR 47F 
EN 62047-14:2012 (pr=23220)
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
2012-04-06 2020-04-06CLC/SR 47F 
EN 62047-18:2013 (pr=24073)
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
2013-09-27 2021-09-27CLC/SR 47F 
EN 62047-19:2013 (pr=24006)
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
2013-09-27 2021-09-27CLC/SR 47F 
EN 62047-5:2011 (pr=22629)
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
2011-08-19 2019-08-19CLC/SR 47F 
EN 62047-6:2010 (pr=21554)
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
2010-03-05 2018-03-05CLC/SR 47F 
EN 62047-7:2011 (pr=22658)
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection
2011-08-05 2019-08-05CLC/SR 47F 
EN 62047-8:2011 (pr=22628)
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
2011-05-06 2019-05-06CLC/SR 47F 
EN 62047-9:2011 (pr=22644)
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
2011-08-19 2019-08-19CLC/SR 47F 

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TC 3 Project files


CLC/SR 47F TC/SC in figures

Current Stage
Year
Year -1
Year -2
Year -3
Year -4
Year >5
Approval stage600000
Published032610

CLC/SR 47F Figures overall

Total publications
32
Published in last 3 years
7
Total work in progress
15
Total proposals
0
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CLC/SR 47F Environment

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CLC/SR 47F EU Directive(s)

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