CENELEC
Project
| Reference | EN 62047-14:2012 |
|---|---|
| Title | Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials |
| Project Number | 23220 |
| Abstract/Scope | IEC 62047-14:2012 describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 μm to 300 μm. The metallic film materials described herein are typically used in electric components, MEMS and micro-devices. When metallic film materials used in MEMS (see 2.1.2 of IEC 62047-1:2005) are fabricated by a forming process such as imprinting, it is necessary to predict the material failure in order to increase the reliability of the components. Through this prediction, the effectiveness of manufacturing MEMS components by a forming process can also be improved, because the period of developing a product can be reduced and manufacturing costs can thus be decreased. This standard presents one of the prediction methods for material failure in imprinting process. |
| Status |
Published
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Status
| Current Stage code | 6060 |
|---|---|
| Current Stage code date | 2012-04-06 |
| Current Stage code deadline | 2013-01-03 |
| Deadline date for vote |
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Details
| IEC Technical Body | IEC/SC 47F |
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| Reference Document | IEC 62047-14:2012 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | Semiconductor; Microelectromechanical; Forming limit; Metallic fillm |
| Note | 2012-03-09: Publication editing allocated to svandriessche@cencenelec.eu |
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Product Life Cycle
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Information
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History
Implementation Dates
| date of Ratification (DOR) (1) | 2012-04-03 |
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| date of Availability (DAV) (2) | 2012-04-06 |
| date of Announcement (DOA) (3) | 2012-07-03 |
| date of Publication (DOP) (4) | 2013-01-03 |
| date of Withdrawal (DOW) (5) | 2015-04-03 |
Relations
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| Normative reference (6) |
EN 62047-1:2006
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(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
