International Standards and Conformity Assessment for all electrical, electronic and related technologies

 

Project

Reference EN 62047-4:2010
Title Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
Project Number 21277
Abstract/Scope IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.
Status
Published

Status

Current Stage code 6060
Current Stage code date 2010-10-15
Current Stage code deadline 2011-07-01
Deadline date for vote  

Legal

Directive(s)  
Mandate(s)  
Order Voucher  

Details

IEC Technical Body IEC/TC 47
Reference Document IEC 62047-4:2008 (EQV)
ICS 31.080.99 - Other semiconductor devices
Keywords Semiconductor;Micro-electromechanical;MEMS
Note  
A-Deviation(s)  
Special National Condition(s)  

Environment

Clause
Categories - Aspects
Product Life Cycle
Information

History

Stage
Date
Deadline Date
Documents
6060 2010-10-15 2011-07-01 export to doc file  EN  FR  DE
5099 2010-10-01 2010-12-01  
5061 2010-08-25 2010-10-01  
5060 2008-08-11 2008-08-25 export to doc file  EN
5020 2008-06-06 2008-08-08  
3090 2007-12-07 2008-02-28  
5091 2007-10-12 2007-11-07  
5060 2007-10-05 2007-10-22 export to doc file  EN
5020 2007-05-04 2007-10-05  
1090 2007-05-01 2007-05-04  

Implementation Dates

date of Ratification (DOR) (1) 2010-10-01
date of Availability (DAV) (2) 2010-10-15
date of Announcement (DOA) (3) 2011-01-01
date of Publication (DOP) (4) 2011-07-01
date of Withdrawal (DOW) (5) 2013-10-01

Relations

Supersedes  
Superseded by  
Normative reference (6) ISO 1000:1992
ISO 2859-1:1999
EN 60027 series
EN 60068 series
IEC 60617:2005
IEC 60747-1
EN 60749 series
EN 61193-2:2007
EN 62047-1:2006
IEC QC 001002-3

(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved


(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat


(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level


(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement


(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn


(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.