CENELEC
Project
| Reference | EN 62047-2:2006 |
|---|---|
| Title | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| Project Number | 16781 |
| Abstract/Scope | Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices. The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features. |
| Status |
Published
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Status
| Current Stage code | 6060 |
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| Current Stage code date | 2006-09-20 |
| Current Stage code deadline | 2007-06-01 |
| Deadline date for vote |
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Details
| IEC Technical Body | IEC/TC 47 |
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| Reference Document | IEC 62047-2:2006 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | Semiconductor; Micro electromechanical; Tensile-testing; Thin film materials |
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Information
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History
Implementation Dates
| date of Ratification (DOR) (1) | 2006-09-01 |
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| date of Availability (DAV) (2) | 2006-09-20 |
| date of Announcement (DOA) (3) | 2006-12-01 |
| date of Publication (DOP) (4) | 2007-06-01 |
| date of Withdrawal (DOW) (5) | 2009-09-01 |
Relations
| Supersedes | |
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| Superseded by | |
| Normative reference (6) | ISO 6892:1998 |
(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
