International Standards and Conformity Assessment for all electrical, electronic and related technologies



Reference EN 62047-10:2011
Title Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Project Number 23075
Abstract/Scope IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. This standard is applicable to metallic, ceramic, and polymeric materials. The contents of the corrigendum of February 2012 have been included in this copy.


Current Stage code 6060
Current Stage code date 2011-09-09
Current Stage code deadline 2012-05-30
Deadline date for vote  


Order Voucher  


IEC Technical Body IEC/SC 47F
Reference Document IEC 62047-10:2011 (EQV) + corrigendum Feb. 2012 (EQV)
ICS 31.080.99 - Other semiconductor devices
Keywords Semiconductor; Microelectromechanical; Micro-pillar; MEMS
Special National Condition(s)  


Categories - Aspects
Product Life Cycle


Deadline Date
6060 2011-09-09 2012-05-30 export to doc file  EN  FR  DE
5099 2011-08-30 2011-09-27  
5060 2011-07-11 2011-08-01 export to doc file  EN
5020 2011-05-06 2011-07-08  
3090 2011-04-01 2011-04-30  
5060 2011-01-10 2011-01-31 export to doc file  EN
5020 2010-08-06 2011-01-07  
1090 2010-08-03 2010-08-06  

Implementation Dates

date of Ratification (DOR) (1) 2011-08-30
date of Availability (DAV) (2) 2011-09-09
date of Announcement (DOA) (3) 2011-11-30
date of Publication (DOP) (4) 2012-05-30
date of Withdrawal (DOW) (5) 2014-08-30


Superseded by  
Normative reference (6) EN 62047-8

(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved

(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat

(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level

(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement

(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn

(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.