CENELEC
Project
| Reference | EN 62047-8:2011 |
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| Title | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
| Project Number | 22628 |
| Abstract/Scope | IEC 62047-8:2011 specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the conventional tensile test. This testing method is valid for test pieces with a thickness between 50 nm and several mum, and with an aspect ratio (ratio of length to thickness) of more than 300. The hanging strip (or bridge) between two fixed supports are widely adopted in MEMS or micro-machines. It is much easier to fabricate these strips than the conventional tensile test pieces. The test procedures are so simple to be readily automated. This international standard can be utilized as a quality control test for MEMS production since its testing throughput is very high compared to the conventional tensile test. |
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Published
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Status
| Current Stage code | 6060 |
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| Current Stage code date | 2011-05-06 |
| Current Stage code deadline | 2012-01-18 |
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Details
| IEC Technical Body | IEC/SC 47F |
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| Reference Document | IEC 62047-8:2011 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | Semiconductor; Micro-electromechanical; Strip bending; Thin; Film |
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History
Implementation Dates
| date of Ratification (DOR) (1) | 2011-04-18 |
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| date of Availability (DAV) (2) | 2011-05-06 |
| date of Announcement (DOA) (3) | 2011-07-18 |
| date of Publication (DOP) (4) | 2012-01-18 |
| date of Withdrawal (DOW) (5) | 2014-04-18 |
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| Normative reference (6) |
(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
