International Standards and Conformity Assessment for all electrical, electronic and related technologies



Reference EN 62047-11:2013
Title Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Project Number 23953
Abstract/Scope IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.


Current Stage code 6060
Current Stage code date 2013-09-27
Current Stage code deadline 2014-05-21
Deadline date for vote  


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IEC Technical Body IEC/SC 47F
Reference Document IEC 62047-11:2013 (EQV)
ICS 31.080.99 - Other semiconductor devices
Keywords Semiconductor; Microelectromechanical; Thermal expansion; Freestanding MEMS; MEMS
Special National Condition(s)  


Categories - Aspects
Product Life Cycle


Deadline Date
6060 2013-09-27 2014-05-21 export to doc file  EN  FR  DE
5099 2013-08-21 2013-09-18  
5060 2013-07-01 2013-07-22 export to doc file  EN
5020 2013-04-26 2013-06-28  
3090 2013-04-23 2013-04-26  
5060 2012-05-29 2012-06-19 export to doc file  EN
5020 2011-12-23 2012-05-25  
1090 2011-12-20 2011-12-23  

Implementation Dates

date of Ratification (DOR) (1) 2013-08-21
date of Availability (DAV) (2) 2013-09-27
date of Announcement (DOA) (3) 2013-11-21
date of Publication (DOP) (4) 2014-05-21
date of Withdrawal (DOW) (5) 2016-08-21


Superseded by  
Normative reference (6) EN 62047-3

(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved

(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat

(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level

(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement

(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn

(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.