CENELEC
Project
| Reference | EN 62047-6:2010 |
|---|---|
| Title | Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials |
| Project Number | 21554 |
| Abstract/Scope | IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis. |
| Status |
Published
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Status
| Current Stage code | 6060 |
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| Current Stage code date | 2010-03-05 |
| Current Stage code deadline | 2010-12-01 |
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Details
| IEC Technical Body | IEC/SC 47F |
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| Reference Document | IEC 62047-6:2009 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | Semiconductor; Micro-electromechanical; Axial; Fatigue test; Thin film |
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History
Implementation Dates
| date of Ratification (DOR) (1) | 2010-03-01 |
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| date of Availability (DAV) (2) | 2010-03-05 |
| date of Announcement (DOA) (3) | 2010-06-01 |
| date of Publication (DOP) (4) | 2010-12-01 |
| date of Withdrawal (DOW) (5) | 2013-03-01 |
Relations
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| Normative reference (6) |
EN 62047-2
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(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
