International Standards and Conformity Assessment for all electrical, electronic and related technologies



Reference EN 62047-13:2012
Title Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
Project Number 23280
Abstract/Scope IEC 62047-13:2012 specifies the adhesive testing method between micro-sized elements and a substrate using the columnar shape of the specimens. This international standard can be applied to adhesive strength measurement of microstructures, prepared on a substrate, with width and thickness of 1 μm to 1 mm, respectively. This standard specifies the adhesive testing method for micro-sized-elements in order to optimally select materials and processing conditions for MEMS devices. This standard does not particularly restrict test piece material, test piece size and performance of the measuring device, since the materials and size of MEMS device components range widely and testing machine for micro-sized materials has not been generalized.


Current Stage code 6060
Current Stage code date 2012-04-06
Current Stage code deadline 2013-01-03
Deadline date for vote  


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IEC Technical Body IEC/SC 47F
Reference Document IEC 62047-13:2012 (EQV)
ICS 31.080.99 - Other semiconductor devices
Keywords Semiconductor; Microelectromechanical; Adhesive; MEMS; Strenght
Note 2012-03-09: Publication editing allocated to
Special National Condition(s)  


Categories - Aspects
Product Life Cycle


Deadline Date
6060 2012-04-06 2013-01-03 export to doc file  EN  FR  DE
5099 2012-04-03 2012-05-01  
5060 2012-02-06 2012-02-27 export to doc file  EN
5020 2011-12-02 2012-02-03  
3090 2011-08-05 2011-09-30  
5060 2011-05-30 2011-06-20 export to doc file  EN
5020 2010-12-24 2011-05-27  
1090 2010-12-21 2010-12-24  

Implementation Dates

date of Ratification (DOR) (1) 2012-04-03
date of Availability (DAV) (2) 2012-04-06
date of Announcement (DOA) (3) 2012-07-03
date of Publication (DOP) (4) 2013-01-03
date of Withdrawal (DOW) (5) 2015-04-03


Superseded by  
Normative reference (6) EN 62047-2:2006

(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved

(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat

(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level

(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement

(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn

(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.