International Standards and Conformity Assessment for all electrical, electronic and related technologies

 

Project

Reference EN 62047-3:2006
Title Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
Project Number 16782
Abstract/Scope Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
Status
Published

Status

Current Stage code 6060
Current Stage code date 2006-09-20
Current Stage code deadline 2007-06-01
Deadline date for vote  

Legal

Directive(s)  
Mandate(s)  
Order Voucher  

Details

IEC Technical Body IEC/TC 47
Reference Document IEC 62047-3:2006 (EQV)
ICS 31.080.99 - Other semiconductor devices
Keywords Semiconductor; Micro electromechanical; Tensile-testing; Thin film
Note  
A-Deviation(s)  
Special National Condition(s)  

Environment

Clause
Categories - Aspects
Product Life Cycle
Information

History

Stage
Date
Deadline Date
Documents
6060 2006-09-20 2007-06-01 export to doc file  EN  FR  DE
5099 2006-09-01 2006-11-01  
5060 2006-07-24 2006-08-07 export to doc file  EN
5020 2006-05-19 2006-07-21  
4099 2005-11-25 2006-02-28  
4020 2005-03-18 2005-09-02  
3099 2005-03-15 2005-03-18  

Implementation Dates

date of Ratification (DOR) (1) 2006-09-01
date of Availability (DAV) (2) 2006-09-20
date of Announcement (DOA) (3) 2006-12-01
date of Publication (DOP) (4) 2007-06-01
date of Withdrawal (DOW) (5) 2009-09-01

Relations

Supersedes  
Superseded by  
Normative reference (6) ISO 17561:2002
EN 62047-2:2006

(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved


(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat


(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level


(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement


(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn


(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.