CENELEC
Project
| Reference | EN 62047-4:2010 |
|---|---|
| Title | Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS |
| Project Number | 21277 |
| Abstract/Scope | IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials. |
| Status |
Published
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Status
| Current Stage code | 6060 |
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| Current Stage code date | 2010-10-15 |
| Current Stage code deadline | 2011-07-01 |
| Deadline date for vote |
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Details
| IEC Technical Body | IEC/TC 47 |
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| Reference Document | IEC 62047-4:2008 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | Semiconductor;Micro-electromechanical;MEMS |
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Product Life Cycle
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Information
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History
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Stage
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Date
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Deadline Date
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Documents
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| 6060 | 2010-10-15 | 2011-07-01 |  EN FR DE |
| 5099 | 2010-10-01 | 2010-12-01 | |
| 5061 | 2010-08-25 | 2010-10-01 | |
| 5060 | 2008-08-11 | 2008-08-25 | EN |
| 5020 | 2008-06-06 | 2008-08-08 | |
| 3090 | 2007-12-07 | 2008-02-28 | |
| 5091 | 2007-10-12 | 2007-11-07 | |
| 5060 | 2007-10-05 | 2007-10-22 | EN |
| 5020 | 2007-05-04 | 2007-10-05 | |
| 1090 | 2007-05-01 | 2007-05-04 |
Implementation Dates
| date of Ratification (DOR) (1) | 2010-10-01 |
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| date of Availability (DAV) (2) | 2010-10-15 |
| date of Announcement (DOA) (3) | 2011-01-01 |
| date of Publication (DOP) (4) | 2011-07-01 |
| date of Withdrawal (DOW) (5) | 2013-10-01 |
Relations
| Supersedes | |
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| Superseded by | |
| Normative reference (6) | ISO 1000:1992 ISO 2859-1:1999 EN 60027 series EN 60068 series IEC 60617:2005 IEC 60747-1 EN 60749 series EN 61193-2:2007 EN 62047-1:2006 IEC QC 001002-3 |
(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
