CENELEC
Projet
| Reference | EN 62047-2:2006 |
|---|---|
| Title | Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 2: Méthode d'essai de traction des matériaux en couche mince |
| Project Number | 16781 |
| Abstract/Scope | Cette norme internationale specifie la methode pour les essais de traction des materiaux en couche mince d fune longueur et d fune largeur inferieure a 1 mm et d fune epaisseur inferieure a 10 Êm, qui sont des materiaux structurels principaux pour les systemes microelectromecaniques (MEMS), micromachines et dispositifs analogues. Les materiaux structurels principaux pour les MEMS, les micromachines et autres dispositifs analogues comportent des caracteristiques speciales telles que des dimensions typiques de l fordre de quelques microns, une fabrication de materiau par depot, et une fabrication d feprouvettes d fessai par usinage non mecanique au moyen de la gravure et de la photolithographie. Cette norme internationale specifie la methode d fessai qui garantit une precision correspondant aux caracteristiques speciales. |
| Status |
Published
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Statut
| Current Stage code | 6060 |
|---|---|
| Current Stage code date | 2006-09-20 |
| Current Stage code deadline | 2007-06-01 |
| Deadline date for vote |
Légal
| Directive(s) | |
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| Mandate(s) | |
| Order Voucher |
Détails
| IEC Technical Body | IEC/TC 47 |
|---|---|
| Reference Document | IEC 62047-2:2006 (EQV) |
| ICS | 31.080.99 - Other semiconductor devices |
| Keywords | |
| Note | |
| A-Deviation(s) | |
| Special National Condition(s) |
Environnement
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Clause
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Categories - Aspects
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Cycle de vie du produit
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Information
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Histoire
Dates de mise en application
| date of Ratification (DOR) (1) | 2006-09-01 |
|---|---|
| date of Availability (DAV) (2) | 2006-09-20 |
| date of Announcement (DOA) (3) | 2006-12-01 |
| date of Publication (DOP) (4) | 2007-06-01 |
| date of Withdrawal (DOW) (5) | 2009-09-01 |
Rélations
| Supersedes | |
|---|---|
| Superseded by | |
| Normative reference (6) | ISO 6892:1998 |
(1) Date of ratification (dor) date when the Technical Board notes the approval of an EN (and HD for CENELEC), from which time the standard may be said to be approved
(2) Date of availability (dav) date when the definitive text in the official language versions of an approved CEN/CENELEC publication is distributed by the Central Secretariat
(3) Date of announcement (doa) latest date by which the existence of an EN (and HD for CENELEC), a TS or a CWA has to be announced at national level
(4) Date of publication (dop) latest date by which an EN has to be implemented at national level by publication of an identical national standard or by endorsement
(5) Date of withdrawal (dow) latest date by which national standards conflicting with an EN (and HD for CENELEC) have to be withdrawn
(6) This list of normative references is purely indicative. The only official list of normative reference is the list of the published standard.
